Revue de Physique Appliquée

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Characterization of X-UV multilayers by grazing incidence X-ray reflectometry

L. Nevot, B. Pardo and J. Corno

Rev. Phys. Appl. (Paris), 23 10 (1988) 1675-1686

DOI: 10.1051/rphysap:0198800230100167500

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