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EBIC investigations of thick SOI layers

M. Kittler, B. Tillack, W. Hoppe, W. Seifert, R. Banisch, H.H. Richter and A. Rocher

Rev. Phys. Appl. (Paris), 23 3 (1988) 281-288

DOI: https://doi.org/10.1051/rphysap:01988002303028100

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