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Zur Herstellung und Untersuchung einkristalliner isolierender Substrate für mikroelektronische Zwecke

J. Herberger, F. Richter, H. Leistner and W. Prescher
Kristall und Technik 8 (12) 1439 (1973)
DOI: 10.1002/crat.19730081212
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