| Numéro |
Rev. Phys. Appl. (Paris)
Volume 23, Numéro 10, octobre 1988
|
|
|---|---|---|
| Page(s) | 1711 - 1726 | |
| DOI | https://doi.org/10.1051/rphysap:0198800230100171100 | |
Rev. Phys. Appl. (Paris) 23, 1711-1726 (1988)
DOI: 10.1051/rphysap:0198800230100171100
Research Institute for Scientific Measurements, Tohoku University, Sendai 980, Japan
0785 - X ray, gamma ray instruments and techniques.
4278H - Optical coatings.
4278F - Performance and testing of optical systems.
4278D - Optical system design.
Key words
optical design techniques -- optical films -- optical workshop techniques -- reviews -- X ray apparatus -- optical design -- optical fabrication -- multilayers -- soft X rays -- optical constants -- thin films
DOI: 10.1051/rphysap:0198800230100171100
Current research activities in the field of multilayers for soft X-rays in Japan
T. NamiokaResearch Institute for Scientific Measurements, Tohoku University, Sendai 980, Japan
Abstract
The present status of studies on soft X-ray multilayers in Japan is briefly reviewed. This includes the design concepts, optical constants of substrates and thin films, fabrication techniques, evaluation methods, and some applications.
Résumé
Les programmes en cours de développement au Japon sont passés brièvement en revue. Les thèmes d'études examinés portent sur les principes des optiques envisagées et sur quelques applications, les études de constantes optiques X-UV des substrats et des films minces ainsi que sur les techniques d'évaporation.
0785 - X ray, gamma ray instruments and techniques.
4278H - Optical coatings.
4278F - Performance and testing of optical systems.
4278D - Optical system design.
Key words
optical design techniques -- optical films -- optical workshop techniques -- reviews -- X ray apparatus -- optical design -- optical fabrication -- multilayers -- soft X rays -- optical constants -- thin films